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MEMS公开课
MEMS将成为21世纪的重要技术途径和国家经济新的增长点，随着MEMS的创新应用，MEMS的应用和发展在我们人与人之间、人与周边环境的互联和信息的交互中起到越来越重要的作用。随着物联网爆发性发展及工业4.0的出现，消费类MEMS及传感器将会在更多的应用领域面临新机遇和新挑战。
主办方邀请了有20多年从事MEMS相关研究及教学经历的Michael Kraft教授，他之前在德国弗劳恩霍夫研究所领导Micro-and Nanosystems部门从事微型传感器和生物合成系统的研究。目前他在比利时烈日大学担任教授，主要从事MEMS相关领域的教学及科研以及工业界的项目。
本次课程主要讲述MEMS的基本概念，MEMS的制造原理及主要MEMS厂商及产品，MEMS设计方法、各种MEMS传感器，这些传感器包括压力传感器、惯性传感器、生物医学传感器等，最后讲述目前市场及未来MEMS的应用与发展。 通过本次课程您们将了解到MEMS器及传感器行业的最新资讯及设计及制造的相关知识，在这次课程中可以接触到参会的MEMS及传感器产业链的各种企业、机构及大学，通过互动与交流，将会促进加强您们在产业链上下游的协同创新和合作。
以下是本次课程大纲：
Day 1--18th Nov. 2015（第一天，2015年11月18号）
Lecture 1: What is MEMS? 第一课：什么是MEMS？
- Where did MEMS come from? -MEMS从而何来？ - Definitions of MEMS, Microsystemtechnology and Nanotechnology -MEMS、微系统技术和纳米技术的定义 - Scaling laws -比例定律 - Some real world examples -一些真实世界的例子
Lecture 2: Economic Status and Predictions 第二课：MEMS经济地位和预测
- Current Market and their economic status -当前MEMS市场和经济地位 - Market data for various MEMS devices and their applications -多种MEMS器件应用及市场数据 - Emerging applications in consumer electronics, Internet of Things, Industry 4.0 and high value markets -MEMS新兴应用：消费电子、物联网、工业4.0和高端市场 - Main MEMS players and product roadmap -主要MEMS厂商和产品路线图 - Discussion Session -讨论环节
Lecture 3: Fabrication Principles for MEMS 第三课：MEMS制造原理
- Surface and bulk micromachining - 表面硅和体硅加工技术 - Standard MEMS fabrication processes -标准MEMS制造工艺 - Economics of fully integrated vs hybrid MEMS -经济性：完全集成 vs. 混合MEMS - MEMS CMOS集成 - Description of main MEMS foundry services and processes -主要MEMS代工服务和工艺说明 - Discussion Session -讨论环节
Day 2--19th Nov. 2015（第二天，2015年11月19号）
Lecture 1: Design Principles for MEMS Physical Sensors
第一课：MEMS物理传感器设计原理
- Main transduction principles used in MEMS -主要MEMS传感器原理 - Main actuation principles used in MEMS -主要MEMS执行器原理 - CAD and simulation tools for MEMS - Practical examples -实践案例
Lecture 2: MEMS Pressure Sensors and Their Applications 第二课：MEMS压力传感器及其应用
- Principles of operation -工作原理 - Pressure sensors for automotive applications -汽车级压力传感器 - Pressure Sensors for consumer applications -消费类压力传感器 - Pressure sensors for medical applications (active implants) -医疗级压力传感器（活性植入物） - Discussion Session -讨论环节
Lecture 3: MEMS Inertial Sensors 第三课：MEMS惯性传感器
- Principles of operation -工作原理 - Accelerometers and gyroscopes - Inertial sensors for consumer applications -消费类惯性传感器 - Inertial sensors for high performance applications -高性能惯性传感器 - Q&A Session -问答环节 - Discussion Session -讨论环节
Day 3--20th Nov. 2015（第三天，2015年20月号）
Lecture 1: MEMS Devices for Biochemical and medical applications 第一课：生物和医疗领域的MEMS器件
- MEMS resonator sensors for bio-analyte concentration measurement -应用于生物分析物浓度测定的MEMS谐振传感器 - Enzymatic sensors -酶传感器 - Artificial retinal prosthesis -人工视网膜假体 - Lab on a chip -芯片实验室
Lecture 2: MEMS for Internet of Things and Industry 4.0 第二课：物联网和工业4.0领域中的MEMS技术
- Energy harvesters -能量收集器 - MEMS for wearable technology -可穿戴设备中的MEMS - MEMS for smart production -智能制造领域中的MEMS - The trillion sensor vision -万亿级传感器前景 - Q&A Session -问答环节
Lecture 3: Emerging MEMS and Applications 第三课：新兴MEMS和应用
- MEMS microphones and ultrasonic sensors -MEMS麦克风和超声波传感器 - MEMS actuators (autofocus, inkjet, microspeaker) -MEMS执行器（自动对焦、喷墨打印头、微扬声器） - MEMS bolometer -MEMS辐射热测量计 - RF MEMS and oscillator - Gas and humidity sensors -气体和湿度传感器 - UV Sensors -紫外线传感器 - MEMS display - Academic MEMS research topics -学术领域的MEMS研究课题 - Round-up and Feedback Session -总结和反馈环节
讲师介绍：Michael Kraft is a Professor of Micro- and Nanosystems at the University of Liege, Department of Electrical Engineering and Computer Science (Montefiore Institute). From 2012-2014, he was at the Fraunhofer Institute for Microelectronic Circuits and Systems in Duisburg, Germany, where he headed the Department of Micro- and Nanosystems focussing on fully integrated microsensors and biohybrid systems. He concurrently held the W3 Professorial Chair of Integrated Micro- and Nanosystems at the University of Duisburg-Essen. From 1999 to 2012 he was a faculty member and Professor of Micro-System-Technology at the University of Southampton, UK. Concurrently, he also was the director of the Southampton Nanofabrication Centre. He graduated with a Dipl.-Ing. (Univ.) in electrical and electronics engineering at the Friedrich Alexander Universität Erlangen-Nürnberg in 1993. In 1997 he was awarded a PhD from Coventry University on the development of a MEMS accelerometer. He then spent two years at the Berkeley Sensors and Actuator Centre at the University of California working on integrated MEMS gyroscopes. He has 20 years of experience in micro- and nano-fabrication techniques, microsensors and actuators and their interface circuits, in particular for capacitive sensors. He has a broad interest in MEMS and nanotechnology ranging from process development to system integration of MEMS and nano-devices. In 2005 his research group developed the world’s first fifth order sigma-delta-modulator (SDM) interface for a MEMS accelerometer, and in 2007 a band-pass SDM for a MEMS gyroscope. He has done ground-breaking work on electrostatically levitated micro-objects for sensing and actuation applications, and developed several novel, micro-fabricated atom and ion chips. He has published over 200 peer reviewed journal and conference publications as an author or co-author. He also contributed to three text books on MEMS, and edited a book on MEMS for aerospace and automotive applications. He currently serves on several steering and technical committees of international conferences such as IEEE Sensors, Eurosensors and MME, as well as being an associate editor for the journals Mechanical Sciences and Sensors and Sensors Systems. He also has done industrial consultancy for many companies active in the MEMS field.
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发表于 2015-10-21 12:30:41